Funder
National Key Research and Development Program of China
Subject
Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering
Reference35 articles.
1. Position control in lithographic equipment [applications of control];Butler;IEEE Control Syst.,2011
2. Frequency response based multivariable control design for motion systems;Boerlage,2005
3. Jerk derivative feedforward control for motion systems;Boerlage,2004
4. Trajectory planning and feedforward design for electromechanical motion systems;Lambrechts;Control Eng. Practice,2005
5. Data-based motion control of wafer scanners;Heertjes;IFAC-PapersOnLine,2016
Cited by
18 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献