Data-Based Motion Control of Wafer Scanners

Author:

Heertjes M.F.

Publisher

Elsevier BV

Subject

Control and Systems Engineering

Reference72 articles.

1. M. Baggen, M.F. Heertjes, and R. Kamidi. (2008) Data-based feed-forward control in MIMO motion systems. In Proc. American Control Conference, Seattle, Washington, USA, pp. 3011-3016.

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3. A cross-coupled iterative learning control design for precision motion control;Barton;Transactions on Control Systems Technology,2008

4. M.A. Beijen, M.F. Heertjes, J. Van Dijk, W.B.J. Hakvoort. (2016) Self-tuning MIMO disturbance feedforward control for active hard-mounted vibration isolators. Transactions on Control Systems Technology, submitted for publication.

5. Iterative motion feedforward tuning: a data-driven approach based on instrumental variable identification;Boeren;Control Engineering Practice,2015

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