Modeling and controller design of a 6-DOF precision positioning system
Author:
Publisher
Elsevier BV
Subject
Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering
Reference48 articles.
1. Design of orientation stages for step and flash imprint lithography;Choi;Precision Eng.,2001
2. Development of a piezo-actuated micro-teleoperation system for cell manipulation;Zareinejad;Int. J. Med. Robot. Comput. Assisted Surg.,2009
3. O. Payton, L. Picco, A. Champneys, et al., Experimental observation of contact mode cantilever dynamics with nanosecond resolution, Rev. Sci. Instrum. 82(4) (2011) 1–5 (043704).
4. W. Yang, S. Lee, B. You, A piezoelectric actuator with a motion-decoupling amplifier for optical disk drives, Smart Mater. Struct. 19(6) (2010) 1–10 (065027).
5. Design, modeling, and testing of a novel 6-DOF micropositioning stage with low profile and low parasitic motion;Moon;Int. J. Adv. Manuf. Technol.,2011
Cited by 79 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A high-speed inchworm piezoelectric actuator with multi-layer flexible clamping: Design, modeling, and experiments;Mechanical Systems and Signal Processing;2024-09
2. On the applications of additive manufacturing in semiconductor manufacturing equipment;Journal of Manufacturing Processes;2024-08
3. Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage;Journal of Micromechanics and Microengineering;2024-07-11
4. A novel stick-slip piezoelectric actuator is developed based on a parallelogram flexible drive mechanism to minimize shear force;Smart Materials and Structures;2024-06-10
5. Design and testing of a high precision parallel manipulator with hyperbolic–elliptic flexure hinges;Precision Engineering;2024-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3