Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements-Reference-Cited by-同舟云学术

Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements

Published:2018-11 Issue: Volume:112 Page:10-21
ISSN:0888-3270
Container-title:Mechanical Systems and Signal Processing
language:en
Short-container-title:Mechanical Systems and Signal Processing

Author:

Brenes A.,Vysotskyi B.,Lefeuvre E.,Juillard J.

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering

Reference24 articles.

1. MEMS Reliability;Hartzell,2011

2. Built-in-self-test techniques for MEMS;Mir;Microelectron. J.,2006

3. Development of a MEMS testing methodology;Kolpekwar;Proc. Int. Test Conf.,1997

4. Structural dynamics of microsystems – current state of research and future directions;Lin;Mech. Syst. Signal Process.,2006

5. MEMS: Introduction and Fundamentals;Sharpe,2005

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