Contactless detection of optical induced current in microelectronic devices by capacitive coupling-Reference-Cited by-同舟云学术

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Contactless detection of optical induced current in microelectronic devices by capacitive coupling

Published:1996-02 Issue:1-4 Volume:31 Page:115-122
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Bergner H.,Hempel K.,Sargsjan G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. Time-resolved investigations of n-MOS devices by capacitive coupling in a laser scanning microscope

2. Introduction to Fields and Circuits;Lancaster,1992

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