Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Focused ion beam lithography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-01
2. Fabrication of ultrahigh quality vertical facets in GaAs using pattern corrected electron beam lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-09
3. Focused ion beam lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-01