Author:
Köhler C.,Brünger W.,Ehrlich Ch.,Huber H.,Reimer K.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. J.S. Greeneich, Electron Beam Technology in Microelectronic Fabrication by G.R.Brewer p.106
2. Proceedings of the Sixth International Conference on Electron and Ion Beam Science and Technology;Hatzakis,1974
Cited by
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