Author:
Petzold H.-C.,Putzar R.,Weigmann U.,Wilke I.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference1 articles.
1. U. Weigmann, H. Burghause, H. Schaffer, Identification of defects on X-ray masks in a focused ion beam repair system, this volume.
Cited by
5 articles.
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1. Advances in Voltage-Contrast Detectors in Scanning Electron Microscopes;Advances in Optical and Electron Microscopy;1991
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3. Surface modification with lasers;Advanced Materials;1990-02
4. Attempt at LSI pattern demagnification by Bragg reflection;Review of Scientific Instruments;1989-07
5. Repair of electroplated gold masks for x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-11