Repair of electroplated gold masks for x-ray lithography-Reference-Cited by-同舟云学术

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Repair of electroplated gold masks for x-ray lithography

Published:1988-11 Issue:6 Volume:6 Page:2170
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Weigmann U.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. X-Ray Lithography;Handbook of VLSI Microlithography;2001

2. Lithography;Fundamentals of Semiconductor Processing Technology;1995

3. Thin Film Deposition;Fundamentals of Semiconductor Processing Technology;1995

4. High‐resolution focused ion beams;Review of Scientific Instruments;1993-05

5. Ion–surface interactions: from sputtering to reactive ion etching;Materials Science and Technology;1992-07

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