Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Proc. IEDM 89;Ulacia,1989
2. A general simulator for VLSI lithography and etching processes: Part II—Application to deposition and etching
3. Proc. 19th Eur. Solid State Device Research Conf. ESSDERC' 89;Gerodolle,1989
4. The influence of ion scattering on dry etch profiles
5. Simulation of ion-enhanced dry-etch processes;Pelka,1990
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