1. Digest of Technical Papers, IEEE Internat. Solid-State Circuit Conf.;Regitz,1970
2. Design of ion-implanted MOSFET's with very small physical dimensions
3. VLSI Fabrication Principles;Ghandi,1983
4. ULSI Fabrication Technologies,1989
5. Literature is available on the 256 M DRAM and related technologies in the recent technical digests of the conferences such as the IEEE International Electron Devices Meeting, IEEE International Solid State Circuits Conference, Symposia on VLSI Technology and Circuits, and International Conferences on Solid State Devices and Materials.