Structural and electrical characterization of sputter-deposited SrTiO3 thin films-Reference-Cited by-同舟云学术

Structural and electrical characterization of sputter-deposited SrTiO3 thin films

Published:1995-12 Issue:1-4 Volume:29 Page:123-127
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Madsen Lynnette D.,Johnson C.Niclas L.,Jacobsen Sissel N.,Helmersson Ulf,Rudner Staffan,Ivanov Ivan,Wernlund Lars-David,Ryen Lars,Olsson Eva

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. RF Sputtered Strontium Titanate Films

2. Electric Properties of SrTiO3Thin Films Prepared by RF Sputtering

3. Novel all‐highTcepitaxial Josephson junction

4. Microstructure of heteroepitaxial YBa2Cu3O7/SrTiO3 multilayer thin films

5. Tunable ceramic phase shifters and their applications

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1. Method for defect stability diagram fromab initiocalculations: A case study of SrTiO3;Physical Review B;2012-11-05

2. Relaxor ferroelectricity in strained epitaxial SrTiO3 thin films on DyScO3 substrates;Applied Physics Letters;2006-05-08

3. Erratum: “Determination of the complex dielectric function of epitaxial SrTiO3 films using transmission electron energy-loss spectroscopy” [J. Appl. Phys. 85, 2828 (1999)];Journal of Applied Physics;1999-07-15

4. Reduction of density of subgrain boundaries and misfit dislocations in epitaxial (001) SrTiO3 thin films: Effect on dielectric tunability;Journal of Applied Physics;1999-04-15

5. Composition, structure, and dielectric tunability of epitaxial SrTiO3 thin films grown by radio frequency magnetron sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-03