Composition, structure, and dielectric tunability of epitaxial SrTiO3 thin films grown by radio frequency magnetron sputtering-Reference-Cited by-同舟云学术

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Composition, structure, and dielectric tunability of epitaxial SrTiO3 thin films grown by radio frequency magnetron sputtering

Published:1999-03 Issue:2 Volume:17 Page:564-570
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Wang Xin,Helmersson Ulf,Madsen Lynnette D.,Ivanov Ivan P.,Münger Peter,Rudner Staffan,Hjörvarsson B.,Sundgren Jan-Eric

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581619

Cited by 41 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Conducting interfaces between LaAlO3 and thick homoepitaxial SrTiO3 films for transferable templates;Applied Surface Science;2022-04

3. Impact of Deep Ultraviolet-Ozone Photoactivation on Dielectric Properties of Amorphous SrTiO<sub>3</sub> Thin Films;Key Engineering Materials;2022-01-21

4. Stoichiometry in epitaxial oxide thin films;Epitaxial Growth of Complex Metal Oxides;2022

5. Effect of Oxygen Partial Pressure on Crystal Structure, Oxygen Vacancy, and Surface Morphology of Epitaxial SrTiO3 Thin Films Grown by Ion Beam Sputter Deposition;Oxygen;2021-09-02

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