Applicability of focused ion beams for nanotechnology-Reference-Cited by-同舟云学术

Applicability of focused ion beams for nanotechnology

Published:1995-02 Issue:1-4 Volume:27 Page:327-330
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

de Jager P.W.H.,Kruit P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference9 articles.

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2. Mechanism of ion beam induced deposition of gold;Ro;J. Vac. Sci. Technol. B,1994

3. A Monte Carlo computer program for the transport of energetic ions in amorphous targets;Biersack;Nucl. Instr. Meth.,1980

4. Addition of different contributions to the charged particle probe size;Barth,1994

5. Electron optics and the electron microscope;Zworykin,1945

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2. Dual scanning tunneling microscope mode of the surface diffusion metal ion source: Li transfer and scanning;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-03

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4. Optical design of a combined ion and electron beam system for nanotechnology;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-11

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