Author:
de Jager P.W.H.,Kelder M.C.W.,Kruit P.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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1. Fabrication and analysis of extreme ultraviolet reflection masks with patterned W/C absorber bilayers;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-03
2. Optical design of a combined ion and electron beam system for nanotechnology;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-11