Author:
Huber H.,Scheunemann U.,Rohrmoser W.,Cullmann E.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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2 articles.
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1. Lithography;Fundamentals of Semiconductor Processing Technology;1995
2. Fabrication of 0.5 μm n- and p-type metal–oxide semiconductor test devices using x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-11