Transition metal nitrides thin films deposition using a dynamically controlled magnetron sputtering apparatus
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
1. Characterization of sputter-deposited chromium nitride thin films for hard coatings
2. Kinetic modeling of film growth rates of TiN films in atomic layer deposition
3. Structural, optical, and electronic properties of cubic TiNx compounds
4. Study of the behaviour in acidic solution of titanium and TiN coatings obtained by cathodic sputtering
5. Asymmetric interface broadening in epitaxial Mo/W (001) superlattices grown by magnetron sputtering
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1. Investigating on the microstructure and optical properties of Au, Ag and Cu implanted TiN thin films: The effects of surface oxidation and ion-induced defects;Journal of Alloys and Compounds;2024-03
2. Anticorrosive AlN coatings for heat exchangers in thermal energy storage systems;Thermal Science and Engineering Progress;2023-08
3. Transition metal carbides and nitrides as catalysts for thermochemical reactions;Journal of Catalysis;2021-12
4. Enhancing oxygen evolution reaction activity of Co4N1-x film electrodes through nitrogen deficiency;Catalysis Today;2021-10
5. Modelling and analysis of sputter deposited ZrN coating by CFD;IOP Conference Series: Materials Science and Engineering;2016-09
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