Author:
Massiani Y.,Crousier J.,Fedrizzi L.,Cavalleri A.,Bonora P.L.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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3. Proc. Semin. On Surface Treatments;Münz,1987
4. Very high rate reactive sputtering of TiN, ZrN and HfN
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