Author:
Vlček J.,Špatenka P.,Musil J.,Forejt L.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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3. Planar magnetron with additional plasma confinement
4. Apparatus for Langmuir probe monitoring of plasma during deposition processes
Cited by
1 articles.
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