Characterisation of high voltage pulser performance in radiofrequency plasmas
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
1. Plasma-Immersion Ion Implantation
2. Sheath development around a high-voltage cathode
3. Survey of high-voltage pulse technology suitable for large-scale plasma source ion implantation processes
4. High voltage modulator for pulsed ion implantation
5. Plasma ion implantation technology for broad industrial application
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