Author:
Rigato V.,Spolaore M.,Giorgis F.,Depero L.E.,Sangaletti L.,Colombo P.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference23 articles.
1. Charged particle fluxes from planar magnetron sputtering sources
2. V. Rigato, M. Spolaore, G. Della Mea, in: D.B. Poker, D. Ila, I.-T. Cheng, L.R. Harriot, T.W. Sigmon (Eds.), Ion Solid Interaction for Materials Modification and Processing, Vol. 396, Materials Research Society, Pittsburgh, 1996, p. 557.
3. S.M. Rossnagel, J. Vac. Sci. Technol. A, 6 (1988) 19. S.M. Rossnagel, I. Yang, J.J. Cuomo, Thin Solid Films 199 (1991) 59.
4. Calculation of deposition rates in diode sputtering systems
5. Slowing down and thermalization of sputtered particle fluxes: Energy distributions