Slowing down and thermalization of sputtered particle fluxes: Energy distributions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332113
Reference9 articles.
1. Calculation of deposition rates in diode sputtering systems
2. Sputtering Process Model of Deposition Rate
3. On resolving the anomaly of indium-tin oxide silicon junctions
4. Thermalization of sputtered atoms
5. Stopping of slow recoil atoms in gases
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