Equipment, technology and protective coatings produced by ion bombardment deposition-Reference-Cited by-同舟云学术

Equipment, technology and protective coatings produced by ion bombardment deposition

Published:1997-05 Issue:1-2 Volume:91 Page:13-19
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Mouboiadjian S.A.,Kablov E.N.,Budinovsky S.A.,Pomelov Ya.A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference15 articles.

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3. 8th Int. Conf. on Vacuum Metallurgy;Dietrich,1985

4. Vacuum High-current Plasma Units and Their Use in Microelectronics Technological Equipment, Part 1. Physical Bases; Part 2. High-energy Plasma Technology;Blinov,1974

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