Author:
Schiller S.,Heisig U.,Goedicke K.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference51 articles.
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4. Alternating ion plating—a way to high rate ion vapor deposition;Schiller;J. Vac. Sci. Technol.,1975
5. Activated reactive evaporation process for high rate deposition of compounds;Bunshah;J. Vac. Sci. Technol.,1972
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