Influence of two reactive gases on the instabilities of the reactive sputtering process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference18 articles.
1. Effect of substrate bias on sputter-deposited TiCx, TiNy and TiCxNy thin films
2. Optical properties of zinc oxynitride thin films
3. Preparation of a new tetragonal copper oxynitride phase by reactive magnetron sputtering
4. Plasma-deposited passivation layers for moisture and water protection
5. Ion-assisted processing of optical coatings
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1. Design, preparation and characterization of antireflective coatings using oxynitride films;Optical Materials;2019-12
2. Reactive magnetron sputter-deposited TiNxOy multilayered solar selective coatings;Solar Energy;2019-03
3. Modeling of a selective solar absorber thin film structure based on double TiNxOy layers for concentrated solar power applications;Solar Energy;2017-01
4. Multiphase Structure of Tantalum Oxynitride TaOxNy Thin Films Deposited by Reactive Magnetron Sputtering;The Journal of Physical Chemistry C;2015-10-06
5. Structural investigations of iron oxynitride multilayered films obtained by reactive gas pulsing process;Surface and Coatings Technology;2015-06
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