A common-path fast-scanning interferometer system for thin-film surface profiling-Reference-Cited by-同舟云学术

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A common-path fast-scanning interferometer system for thin-film surface profiling

Published:2003-07 Issue:1-3 Volume:171 Page:194-197
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Cheon M.S.,Nam Y.U.,Hwang Y.S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference4 articles.

1. A common-path heterodyne interferometer for surface profiling in microelectronic fabrication

2. Submillimeter interferometry of high-density plasmas;Veron,1979

3. Laser Electronics;Verdeyen,1989

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improved common-path fast-scanning heterodyne interferometer system as potential dense-plasma diagnostics;Review of Scientific Instruments;2004-10

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