A common-path heterodyne interferometer for surface profiling in microelectronic fabrication
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1367353
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1. Measurements of the Complex Transmission/Reflection Coefficient of a Material Using Mixed-Type Common-Path Heterodyne Interferometery;IEEE Transactions on Instrumentation and Measurement;2009-06
2. Polarization shifting interferometric profilometer;Optics and Lasers in Engineering;2008-03
3. Mach-Zehnder optical interferometric polarimeter using two reference beams with different heterodyne frequency;SPIE Proceedings;2007-11-29
4. Improved common-path fast-scanning heterodyne interferometer system as potential dense-plasma diagnostics;Review of Scientific Instruments;2004-10
5. A common-path fast-scanning interferometer system for thin-film surface profiling;Surface and Coatings Technology;2003-07
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