Influence of process parameters on the growth of TiN in different sized plasma-assisted chemical vapor deposition reactors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference11 articles.
1. Preparation, characterization and wear behaviour of PACVD cermets
2. Synthesis of TiN/TiCN/TiC layer systems on steel and cermet substrates by PACVD
3. Über die binären Systeme des Titans mit den Elementen Stickstoff, Kohlenstoff, Bor und Beryllium
4. A parametric study of the microstructural, mechanical and tribological properties of PACVD TiN coatings
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1. Effects of Duty Cycle on Nanostructured TiN Coatings on AISI H11 and AISI D2 Steels;Journal of Bio- and Tribo-Corrosion;2024-05-24
2. Deposition of TiN, TiC, and DLC Coatings by PACVD;Production, Properties, and Applications of High Temperature Coatings;2018
3. A Review on Titanium Nitride and Titanium Carbide Single and Multilayer Coatings Deposited by Plasma Assisted Chemical Vapor Deposition;International Journal of Engineering;2016-05-01
4. Size-dependency of corrosion behavior for TiN nanostructure coatings deposited by the PACVD method;Materials Letters;2012-09
5. The Influence of Plasma Nitriding Pre-Treatment on Tribological Properties of TiN Coatings Deposited by PACVD;J MATER ENG PERFORM;2012
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