Author:
Stempflé Philippe,Njiwa Richard Kouitat
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics
Reference71 articles.
1. Nanotribology of MEMS/NEMS;Achanta,2007
2. Nanotribology and Nanomechanics, an introduction,2005
3. Nanotribology and nanomechanics;Bhushan;Wear,2005
4. Micro-tribological studies of doped single-crystal silicon and polysilicon films for MEMS devices;Bhushan;Sens. Actuat. A,1996
5. MEMS & Microsystems, Design, Manufacture, & Nanoscale Engineering;Hsu,2008
Cited by
4 articles.
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