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A user-friendly FIB lift-out technique to prepare plan-view TEM sample of 2D thin film materials

  • Published:2022-05 Issue: Volume:235 Page:113496
  • ISSN:0304-3991
  • Container-title:Ultramicroscopy
  • language:en
  • Short-container-title:Ultramicroscopy

Author:

Rajput Nitul SORCID,Sloyan Karen,Anjum Dalaver H.ORCID,Chiesa Matteo,Ghaferi Amal Al

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Sample Preparation Handbook for Transmission Electron Microscopy Methodology;Ayache,2010

2. Transmission Electrons Microscopy A Textbook for Materials Science;Williams,2009

3. In situ lift-out using a FIB-SEM system;Langford;Micron,2004

4. Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling;Langford;Journal of Vacuum Science & Technology A,2001

5. Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice;Giannuzzi,2005
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