Optimized Ar+-ion milling procedure for TEM cross-section sample preparation

Author:

Dieterle Levin,Butz Benjamin,Müller Erich

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. Sample Preparation Handbook for Transmission Electron Microscopy: Techniques;Ayache,2010

2. Sample Preparation Handbook for Transmission Electron Microscopy: Methodology;Ayache,2010

3. Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy;Suder;Thin Solid Films,1997

4. Small-angle cleavage of semiconductors for transmission electron microscopy;McCaffrey;Ultramicroscopy,1991

5. Fast and simple specimen preparation for TEM studies of oxide films deposited on silicon wafers;Teodorescu;Microscopy and Microanalysis,2009

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