Dual-Probe Atomic Force Microscopy based on tuning fork probes for critical dimension metrology-Reference-Cited by-同舟云学术

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Dual-Probe Atomic Force Microscopy based on tuning fork probes for critical dimension metrology

Published:2020-12 Issue: Volume:219 Page:113120
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Zheng Zhiyue,Gao Sitian,Li Wei,Liu Xiaojun,Shi Yushu,Chen Cheng

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference47 articles.

1. Metrology for the next generation of semiconductor devices;Orji;Nature Electronics,2018

2. Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling;Menard;Nano. Lett.,2011

3. Silicon nanostructures for photonics and photovoltaics;Francesco;Nat. Nanotechnol.,2014

4. Lithography, metrology and nanomanufacturing;Liddle;Nanoscale,2011

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomic force microscopy based micro and nano sidewall imaging;Nanoscience;2024-09-04

2. Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique;Journal of Applied Physics;2023-02-09

3. Recent Progress in Self-sensing Probe Technology in Atomic Force Microscope;Current Nanoscience;2021-12-23

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