Nanotribological characterization of digital micromirror devices using an atomic force microscope-Reference-Cited by-同舟云学术

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Nanotribological characterization of digital micromirror devices using an atomic force microscope

Published:2004-08 Issue:3-4 Volume:100 Page:391-412
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Liu Huiwen,Bhushan Bharat

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Anonymous, Microelectromechanical Systems: Advanced Materials and Fabrication Methods, NMAB-483, National Academy Press, Washington, DC, 1997.

2. Nanoelectromechanical systems face the future

3. M.A. Huff, A distributed MEMS processing environment, 2002. http://www.mems-exchange.org/.

4. Tribology Issues and Opportunities in MEMS;Bhushan,1998

5. Handbook of Micro/Nanotribology;Bhushan,1999

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