Continuous capacitance–voltage spectroscopy mapping for scanning microwave microscopy

Author:

Moertelmaier M.,Huber H.P.,Rankl C.,Kienberger F.

Funder

European Commission FP7 Project ‘V-SMMART Nano’

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors;Kopanski;Materials Science and Engineering: B,1997

2. Quantitative scanning capacitance spectroscopy;Brezna;Applied Physics Letters,2003

3. Nanometer-scale material contrast imaging with a near-field microwave microscope;Imtiaz;Applied Physics Letters,2007

4. Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy;Wolf;Journal of Vaccum Science & Technology B 18,,2000

5. The physical principles of scanning capacitance spectroscopy;Isenbart;Applied Physics A: Materials Science and Processing,2001

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