1. P. Cogez, M. Graef, B. Huizing, R. Mahnkopf, H. Ishiuchi, J. Shindo et al., The International Technology Roadmap for Semiconductors, 2011 Edition Metrology, International Roadmap Committee, 2011.
2. P. Cogez, M. Graef, B. Huizing, R. Mahnkopf, H. Ishiuchi, J. Shindo et al., The International Technology Roadmap for Semiconductors, 2012 Update, International Roadmap Committee, 2012.
3. Depth resolution function of the laser assisted tomographic atom probe in the investigation of semiconductors;Cadel;J. Appl. Phys.,2009
4. Atom-probe tomography of semiconductor materials and device structures;Lauhon;MRS Bull.,2009
5. D.J. Larson, T.J. Prosa, D. Lawrence, B.P. Geiser, C.M. Jones, T.F. Kelly, Atom probe tomography for microelectronics, Handb. Instrum. Tech. Semicond. Nanostruc. Charact., 2011, pp. 407–470.