Author:
Tabean Saba,Mousley Michael,Pauly Christoph,De Castro Olivier,Serralta Eduardo,Klingner Nico,Mücklich Frank,Hlawacek Gregor,Wirtz Tom,Eswara Santhana
Funder
Horizon 2020
Fonds National de la Recherche Luxembourg
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Helium ion microscopy,2018
2. Sub-10-nm nanolithography with a scanning helium beam;Sidorkin;J. Vac. Sci. Technol. B Microelectron. Nanom. Struct.,2009
3. Co-Registered In Situ Secondary Electron and Mass Spectral Imaging on the Helium Ion Microscope Demonstrated Using Lithium Titanate and Magnesium Oxide Nanoparticles;Dowsett;Anal. Chem.,2017
4. Time-of-flight secondary ion mass spectrometry in the helium ion microscope;Klingner;Ultramicroscopy,2019
5. Review Article: advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams;Stanford;J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Mater. Process. Meas. Phenom,2017
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献