Effects of gas depletion on dc plasma deposited, a-Si single junction p–i–n solar cells with i-layers deposited at 10 Å/s
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Proceedings of the 28th IEEE;Arya,2001
2. Performance of a-Si-H Solar Cells at Higher Growth Rates
3. Conference on Record of 25th IEEE PVSC;Matsuda,1996
4. Influence of Plasma Excitation Frequency on Deposition Rate and on Film Properties for Hydrogenated Amorphous Silicon
5. High Deposition Rate P-I-N Solar Cells Prepared from Disilane Using VHF Discharges
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Revisiting the gas flow rate effect on diamond films deposition with a new dome-shaped cavity type microwave plasma CVD reactor;Diamond and Related Materials;2017-03
2. Room Temperature Recovery of Light Induced Changes in Amorphous Silicon Solar Cells;MRS Proceedings;2003
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