Electrical properties of Al2O3 film deposited at low temperatures
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. 58th Device Research Conference Digest;Shrew,2000
2. A reduced complexity process for organic thin film transistors
3. Fast organic thin-film transistor circuits
4. The Oxide Handbook;Samsonov,1982
5. High damage threshold dielectric coatings for excimer lasers
Cited by 37 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High performance bilayer MoTe2 transistors with co-sputtered ternary HfAlO2 high-k dielectric;Applied Physics Letters;2024-03-18
2. Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures;2020 IEEE SENSORS;2020-10-25
3. Growth of Ultrathin Al2O3 Films on n-InP Substrates as Insulating Layers by RF Magnetron Sputtering and Study on the Optical and Dielectric Properties;Coatings;2019-05-26
4. Electrical conduction mechanisms and dielectric relaxation in Al2O3 thin films deposited by thermal atomic layer deposition;Materials Science in Semiconductor Processing;2018-11
5. N-doped Al2O3 thin films deposited by atomic layer deposition;Thin Solid Films;2018-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3