Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators
Author:
Funder
Air Force Research Laboratory
Publisher
Elsevier BV
Subject
Applied Mathematics,Modelling and Simulation,Numerical Analysis
Reference28 articles.
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2. Effects of the Temperature-Dependent Behavior of the Gap-Filling PDMS on the Response of a Capacitive MEMS to the Electrostatic Actuation;International Journal of Applied Mechanics;2024-03-07
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