Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics
Reference7 articles.
1. Spacial effects in plasma deposition of SiOx using a magnetically enhanced glow discharge;Kaganowicz,1983
2. Room temperature glow discharge deposition of silicon oxides from SiH4 and H2O;Kaganowicz;J. Vac. Sci. Technol. A,1984
3. G. Kaganowicz and J. W. Robinson, U.S. Patent 4,355,052, 1982.
4. G. Kim, personal communication, 1983.
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