Computational studies of the transient behavior of horizontal MOVPE reactors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
1. Complex flow phenomena in vertical MOCVD reactors: Effects on deposition uniformity and interface abruptness
2. Hydrodynamic dispersion in rotating-disk omvpe reactors: Numerical simulation and experimental measurements
3. Metalorganic chemical vapor deposition of III‐V semiconductors
4. Device quality epitaxial gallium arsenide grown by the metal alkyl-hydride technique
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