In situ monitoring and control of multicomponent gas-phase streams for growth of GaN via MOCVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference16 articles.
1. Candela‐class high‐brightness InGaN/AlGaN double‐heterostructure blue‐light‐emitting diodes
2. GaN, AlN, and InN: A review
3. In situ measurement of the metalorganic and hydride partial pressures in a MOCVD reactor using ultraviolet absorption spectroscopy
4. Control of III–V epitaxy in a metalorganic chemical vapor deposition process: impact of source flow control on composition and thickness
5. UV absorption spectroscopy for monitoring hydride vapor‐phase epitaxy of InGaAsP alloys
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