Advanced process control for high quality R&D and production of MOVPE material by RealTemp™
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference10 articles.
1. Optical approaches to the determination of composition of semiconductor alloys during epitaxy
2. G.B. Stringfellow, Organimetallic Vapor-Phase Epitaxy, Academic Press, San Diego, 1999, pp. 373–378.
3. Real-time monitoring of MOVPE device growth by reflectance anisotropy spectroscopy and related optical techniques
4. Spectroscopic process sensors in MOVPE device production
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2. GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process;Applied Optics;2005-03-20
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