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In situ real time monitoring of thickness and composition in MBE using alpha particle energy loss

  • Published:1999-05 Issue: Volume:201-202 Page:26-30
  • ISSN:0022-0248
  • Container-title:Journal of Crystal Growth
  • language:en
  • Short-container-title:Journal of Crystal Growth

Author:

Beaudoin M.,Adamcyk M.,Levy Y.,MacKenzie J.A.,Ritchie S.,Tiedje T.,Gelbart Z.,Giesen U.,Kelson I.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation of thickness uniformity of thin metal films by using α-particle energy loss method and successive scanning measurements;Journal of Instrumentation;2017-03-06

2. Atomic Layer Deposition of LaF3 Thin Films using La(thd)3 and TiF4 as Precursors;Chemical Vapor Deposition;2008-04

3. Mapping of non-planar surfaces and film conformality by alpha-particle energy loss spectroscopy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-10

4. Real-time composition control of InAlAs grown on InP using spectroscopic ellipsometry;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
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