Computer simulation of temporal aspects of the copper single crystal sputtering-Reference-Cited by-同舟云学术

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Computer simulation of temporal aspects of the copper single crystal sputtering

Published:1993-07 Issue:2 Volume:82 Page:234-241
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Hou M.,Eckstein W.,Robinson M.T.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference35 articles.

1. Proc. Symp. on Sputtering;Jackson,1980

2. Application of molecular dynamics simulations to the study of ion-bombarded metal surfaces

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Time-dependent angular and energy distributions of sputtered copper atoms;CAN J PHYS;2000

2. Time-dependent angular and energy distributions of sputtered copper atoms;Canadian Journal of Physics;2000-09-01

3. Temporal aspects of sputtering of TaC, C, and Ta targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-02

4. TEMPORAL ASPECTS OF SPUTTERING OF TAC TARGETS;NUCL INSTRUM METH B;1995

5. Temporal aspects of sputtering of TaC targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-08

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