Temporal aspects of sputtering of TaC, C, and Ta targets-Reference-Cited by-同舟云学术

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Temporal aspects of sputtering of TaC, C, and Ta targets

Published:1997-02 Issue:2 Volume:122 Page:215-223
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Vichev R.G.,Eckstein W.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference22 articles.

1. Time dependence of radiation damage cascades

2. Computer Simulation of Ion-Solid Interactions;Eckstein,1991

3. A molecular dynamics computer simulation of the time dependence of surface damage production in ion irradiated metal targets

4. Application of molecular dynamics simulations to the study of ion-bombarded metal surfaces

5. Sputtering by cluster ions

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atom and molecule emission caused by ion impact into a frozen oxygen target: Role of rovibrational excitation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-11

2. Sputtering Yields;Topics in Applied Physics

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