Ion-beam-enhanced adhesion of Au films on Si and SiO2

Author:

Berkowitz A.E.,Benenson R.E.,Fleischer R.L.,Wielunski L.,Lanford W.A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference7 articles.

1. Proc. 6th Int. Conf. on Ion Beam Analysis;Tombrello,1983

2. Nuclear Tracks in Solids;Fleischer,1975

3. Enhanced adhesion from high energy ion irradiation

4. Compaction States of Vitreous Silica;Primak,1975

5. Range and stopping-power tables for heavy ions

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1. Properties of noble-metal/silicon junctions;Materials Science Reports;1992-06

2. Modification of the structure and composition of tin oxide by ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-07

3. Blister formation in alumina thin films bombarded with xenon ions;Radiation Effects and Defects in Solids;1990-11

4. Effect of High Energy Ion Bombardment on the Tribological Properties of WS2 Sputtered Films;Journal of Tribology;1988-10-01

5. MeV ion beam enhanced adhesion of Au films on alumina;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1988-08

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