Ion beam synthesis of buried metallic and semiconducting silicides-Reference-Cited by-同舟云学术

Ion beam synthesis of buried metallic and semiconducting silicides

Published:1993-01 Issue: Volume:80-81 Page:895-900
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Mantl S.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference39 articles.

2. Silicon-on-insulator Technology: Materials to VLSI;Colinge,1991

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2. Surface and Thin-Film Analysis, 3. Ion Detection;Ullmann's Encyclopedia of Industrial Chemistry;2011-10-15

3. Rutherford Backscattering Spectroscopy (RBS);Surface and Thin Film Analysis;2011-04-12

4. Structural characterization of amorphous Fe–Si and its recrystallized layers;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-09