Lattice location of implanted carbon in GaAs

Author:

Mader A.,Meyer J.D.,Bethge K.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Comparative study of MeV C[sup +] and C[sub 2][sup +] ion implantation in GaAs(100): Surface roughness and evaluation of lattice strain;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003

2. Monte Carlo simulation of particle-induced X-ray emission channeling spectra of GaAs crystals;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-07

3. Relation between the substitutional fraction and electrical activation of carbon in heavily C-ion implanted GaAs;Journal of Applied Physics;1999-05

4. Lattice location of N in ZnSe by channeling-NRA;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-10

5. Radiation Damage and Amorphization Mechanisms in Xe+ Irradiated CuInSe2 Single Crystals;Materials Science Forum;1997-05

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