Sputtering of solids under light-ion bombardment
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. Sputtering and backscattering of keV light ions bombarding random targets
3. Contributions of backscattered ions to sputtering yields depending on primary ion energy
4. Secondary-recoil contribution to low-energy light-ion sputtering
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3. Determination of the Relative Concentration of Deuterium Implanted into Beryllium by Elastic Peak Electron Spectroscopy;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2019-09
4. On the energy distribution of sputtered atoms at normal ion incidence;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-09
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